著者:Jun Wu, Hui Zhang, and Tamio Ikehashi
論題:"Fabrication of Low-resonant-frequency Inertial MEMS using Through-silicon DRIE applied to Silicon-on-glass"
誌名:Japanese Journal of Applied Physics 63, 056501 (2024)
Open access URL:https://doi.org/10.35848/1347-4065/ad3da1